COATING THICKNESS METER AND COATING THICKNESS MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating thickness meter and a coating thickness measurement method for precisely controlling coating thickness by improving the S/N ratio of an electric signal determined by measuring the coating thickness of a thin film during film formation without depending on a measurement wavelength.;SOLUTION: The coating thickness meter A comprises a light source 10; a spectroscope 20, where measurement light is guided from a substrate 1; and a controller 30. The spectroscope 20 comprises a spectral section 21 for dispensing measurement light, and a light reception section having a plurality of photodiodes for photoelectrically converting the luminous flux being dispensed by the spectral section 21 for inducing a light reception current. The controller 30 comprises a means for transmitting a signal for performing a specific number of reception light current output measurements by different exposure time to the spectroscope 20; a means for identifying a measurement value being equal to or less than a saturation output value in measurement values determined by a specific number of light reception current output measurements from the spectroscope 20; and a means for adopting a measurement value by a measurement having a longer exposure time when there are a plurality of measurement values being equal to or less than a saturation output value at a specific measurement wavelength.;COPYRIGHT: (C)2004,JPO&NCIPI