Has the distribution system of the chemical compound for chemical vapor phase vapor deposition method and the distribution system of this chemical compound the thin film manufacturing system

摘要

PROBLEM TO BE SOLVED: To provide a supplying system for efficiently realizing a method for supplying thin film raw material for CVD, incorporating a recycle technique.;SOLUTION: This system for supplying compounds for chemical vapor deposition method, provided with a receiving order processor, and a stock amount database, and a billing processor, comprises analyzing means provided with analyzed information output means, which analyze spent compounds returned by a client, and can output analyzed information on at least a weight of non- reacted compounds in the spent compounds; reproducing means provided with reproducing information outputting means, which separate from the non-reacted compounds from the spent compounds and refine them, and output reproducing information on at least an amount of reproduced compounds; and a raw material information database which stores shipping information at an initial shipping of the spent compounds.;COPYRIGHT: (C)2002,JPO