n-TYPE DIAMOND SEMICONDUCTOR, ELECTRIC CONDUCTIVITY CONVERTING METHOD OF DIAMOND SEMICONDUCTOR, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an n-type diamond semiconductor having low resistant n-type electric conductivity and an electric conductivity converting method of the diamond semiconductor which can easily obtain the diamond semiconductor having required electric conductivity.;SOLUTION: A p-type diamond thin film formed by a CVD method from a carbon source is subjected to an inert gas, thereby converting it into an n-type diamond semiconductor.;COPYRIGHT: (C)2005,JPO&NCIPI