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Semiconductor component handling device having an electrostatic dissipating film

机译:具有静电消散膜的半导体元件处理装置

摘要

The present invention relates generally to a system and method for including a thin conductive polymer film, such carbon-filled PEEK, in the molding process for handlers, transporters, carriers, trays and like devices utilized in the semiconductor processing industry. The conductive film of predetermined size and shape is selectively placed along a shaping surface in a mold cavity for alignment with a desired target surface of a moldable material. The molding process causes a surface of the film to bond to a contact surface of the moldable material such that the film is permanently adhered to the moldable material. As a result, a compatible conductive polymer can be selectively bonded only to those target surfaces where ESD is needed.
机译:本发明总体上涉及一种系统和方法,该系统和方法在用于半导体加工工业中使用的处理机,运输器,载体,托盘和类似装置的模制过程中包括薄的导电聚合物膜,例如填充碳的PEEK。将预定尺寸和形状的导电膜沿着成型腔中的成型表面选择性地放置,以与可成型材料的期望目标表面对准。模制过程使薄膜的表面粘结到可模制材料的接触表面上,从而使薄膜永久地粘附到可模制材料上。结果,相容的导电聚合物可以仅选择性地结合到需要ESD的那些目标表面。

著录项

  • 公开/公告号US2005056601A1

    专利类型

  • 公开/公告日2005-03-17

    原文格式PDF

  • 申请/专利权人 SANJIV M. BHATT;SHAWN D. EGGUM;

    申请/专利号US20040496679

  • 发明设计人 SANJIV M. BHATT;SHAWN D. EGGUM;

    申请日2002-11-26

  • 分类号A47G19/08;

  • 国家 US

  • 入库时间 2022-08-21 22:24:40

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