THIN FILM ACTUATED MIRROR ARRAY IN AN OPTICAL PROJECTION SYSTEM AND METHOD FOR MANUFACTURING THE SAME

摘要

Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having electrical wiring and a connecting terminal, an actuator, and a reflecting member (160). The actuator has a supporting layer (120), a bottom electrode (125), an active layer (130), and a top electrode (140). The supporting layer (120) has a first portion attached beneath the bottom electrode and a second portion exposed out of the bottom electrode. The reflecting member (160) is formed on the second portion of supporting layer (120). The supporting layer (120) tilts with the actuator. Hence, the thin film AMA has much enhanced light efficiency of the light reflected by the reflecting member (160) by minimizing the area of the actuator and maximizing the area of the reflecting member (160), so the quality of a picture projected onto a screen is greatly increased.