Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method

摘要

Barium strontium titanate (Ba 0.5 Sr 0.5 TiO 3 , BST)/silicon nanoporous pillar array (Si-NPA) thin films were prepared by a spin-coating/annealing technique based on Si-NPA with micro/nano-structure. Both the isomer conversion of acetylacetone and the network structure combined by enol and Ti-alkoxide facilitate the formation of the BST sol and the subsequent crystallization. Before the perovskite BST begins to form, the intermediate phase (Ba,Sr)Ti 2 O 5 CO 3 is found. The boundary between BST and Si-NPA is of clarity and little interface diffusion, disclosing that Si-NPA is an ideal template substrate in the preparation of multifunctional composite films.