Abstract: The Thin-Film Actuated Mirror Array (TFAMA) is a new reflective type spatial light modulator developed by using the microelectromechanical system technology. The micromachined thin-film piezoelectric actuators are used to control the tilting angle of micromirrors. This paper describes the principle, design, fabrication and the performance of the TFAMA module for high-brightness projection displays. Maximizing the optical performance in terms of the fill factor and the mirror flatness is the main issue of this paper. A hidden actuator design with the two- spacer process provides the highest optical efficiency among the reflection light modulators at the present time. A working projector prototype of 5,000 ANSI lumen is realized with three TFAMA modules with a 1 kW Xenon lamp.!9
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