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Apparatus for coupling a test head and probe card in a wafer testing system

机译:用于在晶片测试系统中耦合测试头和探针卡的设备

摘要

An apparatus for coupling a test head and probe card in a wafer testing system incorporates a number of features that contribute to low impedance and reduced cross-talk, making the coupling apparatus particularly advantageous for high-speed test applications. The coupling apparatus may include, for example, an array of discrete conductor conduits that contain individual conducting elements. The conduits can be insulated, if desired, to reduce leakage. Further, the conduits can be made from metal, and terminated in dielectric interface plates for improved impedance matching. Divider elements can be provided to physically and electrically isolate adjacent rows of conductor conduits. Also, adjacent conducting elements can be connected to carry ground and signal potentials in an alternating manner such that signal carrying elements in a common row are separated from one another by ground carrying elements.
机译:在晶片测试系统中用于耦合测试头和探针卡的设备具有许多有助于降低阻抗和减少串扰的功能,从而使耦合设备特别适用于高速测试应用。耦合装置可包括例如包含独立导电元件的离散导体导管的阵列。如果需要,可以将导管绝缘以减少泄漏。此外,导管可以由金属制成,并且终止于介电界面板中以改善阻抗匹配。可以提供分隔器元件以物理和电隔离导体导管的相邻行。而且,相邻的导电元件可以连接以交替的方式承载地电势和信号电势,使得在同一行中的信号承载元件通过地面承载元件彼此分开。

著录项

  • 公开/公告号EP0977045B1

    专利类型

  • 公开/公告日2005-03-16

    原文格式PDF

  • 申请/专利权人 INTEST IP CORP;

    申请/专利号EP19990306010

  • 发明设计人 SARGENT THORNTON W. IV;SMITH DOUGLAS W.;

    申请日1999-07-29

  • 分类号G01R31/316;

  • 国家 EP

  • 入库时间 2022-08-21 22:10:50

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