Semiconductor Measurement Technology: A Manual Wafer Probe Station for an Integrated Circuit Test System

摘要

This report describes the design of a manual wafer probe station for wafer-level testing of integrated circuits, test structures, and test patterns. The station includes a translatable vacuum chuck, a probe assembly which can be used for probe cards or individual micropositioner-mounted probes, and a microscope holder. Except for a few components which are commercially available, construction details are provided for all parts.