An Automated System Based on Cryogenic Probe Station for Integrated Studies of Semiconductor Light-Emitting Structures and Wafers in the Range of 15 to 475 K

摘要

An automated system for integrated electrophysical and optical studies of semiconductor nano-heterostructures, which operates in a wide temperature range from 15 to 475 K, is designed. The setup is intended to measure the temperature and frequency admittance and electroluminescence spectra of light-emitting diode and laser chips formed on substrates of diameter up to 50.2 mm, and the distribution of parameters over the wafer. The setup includes the closed-cycle helium cryogenic station, LCR meter, and temperature controller. The characterization results of nanoheterostructures with InGaN/GaN multiple quantum wells, which are used for creating highly efficient white and blue light-emitting diodes, are presented.