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Temperature compensation mechanism for a micromechanical ring resonator

机译:微机械环形谐振器的温度补偿机制

摘要

There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate, according to a first oscillation mode, around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.
机译:描述了一种时基,该时基包括谐振器(4)和集成电路(3),该集成电路使谐振器驱动为振荡并响应于该振荡而产生具有确定频率的信号。该谐振器是集成的微机械环形谐振器,该微机械环形谐振器支撑在基板(2)上方,并适于根据第一振荡模式围绕基本垂直于基板的旋转轴(O)振荡,该环形谐振器包括中央支柱(5沿着旋转轴从基板延伸的自支撑振动结构(6)连接到中心柱,并包括与旋转轴同轴并通过多个连接到中心柱的外环(60)弹簧元件(62)和电极结构(9; 9 *)围绕外环布置并连接到集成电路。电极(100、120; 130、150)以这样的方式定位在独立式振荡结构的下方,以在基本上垂直于基板并且具有不同于共振频率的平面中驱动和感测第二振荡模式。第一振荡模式的谐振频率,两个振荡模式的谐振频率之间的频率差用于补偿温度对时基产生的信号频率的影响。

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