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PASSIVE TCF COMPENSATION IN HIGH Q SILICON MICROMECHANICAL RESONATORS

机译：高Q硅微机械谐振器中的无源TCF补偿

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Micromechanical Resonators; A. K. Samarao; G. Casinovi; F. Ayazi;
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年度 2010
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2. Dependence of temperature coefficient of frequency (TCf) on crystallography and eigenmode in N-doped silicon contour mode micromechanical resonators [J] . Haoshen Zhu, Cheng Tu, Guangcun Shan, Sensors and Actuators, A. Physical . 2014,第Null期

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3. Exploiting nonlinear amplitude-frequency dependence for temperature compensation in silicon micromechanical resonators [J] . M. Defoort, P. Taheri-Tehrani, D. A. Horsley Applied Physics Letters . 2016,第15期

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4. Passive TCF compensation in high Q silicon micromechanical resonators [C] . Samarao A.K., Casinovi G., Ayazi F. Micro Electro Mechanical Systems (MEMS), 2010 . 2010

机译：高Q硅微机械谐振器中的无源TCF补偿
5. Compensation and trimming for silicon micromechanical resonators and resonator arrays for timing and spectral processing. [D] . Samarao, Ashwin K. 2011

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6. Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator [O] . Kuo Lu, Qingsong Li, Xin Zhou, 2020

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7. Excitation, detection, and passive cooling of a micromechanical cantilever using near-field of a microwave resonator [O] . Hao, L, Gallop, JC, Cox, D 2009

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8. Squeezing of Light via Reflection from a Silicon Micromechanical Resonator. [R] . Safavi-Naeini, A. H., Groeblacher, S., Hill, J. T., 2013

机译：通过硅微机械谐振器的反射挤压光。

PASSIVE TCF COMPENSATION IN HIGH Q SILICON MICROMECHANICAL RESONATORS

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