EUV source with rotating electrodes and methods for producing EUV radiation from the gas discharge plasma

摘要

1. The EUV radiation source with rotating electrodes rigidly secured to the shaft, comprising a pulse discharge initiation system and a discharge power supply connected to the electrodes, wherein the electrodes are used as two disk-shaped elements, the central axis of symmetry aligned with the axis of the shaft , the peripheral portion of the surface of at least one of the electrodes is covered with a layer of fusible metal, and introduced a system supplying low-melting metal on the surface of at least one of the electrodes, and as the system discharge initiation applied device forming a vapor channel in the peripheral region of the electrode gap .2. The EUV radiation source with rotating electrodes according to claim 1, characterized in that the steam channel forming apparatus using the laser or electron gun system focusing the beam on a layer of fusible metal is used as a working substance, primarily tin (Sn), the plasma which It has an emission line in the EUV range spektra.3. The EUV radiation source with rotating electrodes according to claim 1, characterized in that the system supplying the low-melting metal on the electrode surface is made in the form of two baths filled with liquid tin, wherein the electrodes are mounted with the possibility of partial immersion in a bath at vraschenii.4. The EUV radiation source with rotating electrodes according to claim 3, characterized in that the baths are electrically insulated from each other, and a power supply connected to the rotating electrodes via the liquid tin filling vanny.5. The EUV radiation source with rotating electrodes according to claim 3, characterized in that in each bath with liquid tin as a heat exchanger to remove heat from elektrodov.6. The EUV radiation source with rotating electrodes according to claim 5, characterized in that the electrodes are equipped with blades for circulating the liquid tin through teploobmennik.7. A method of producing EUV radiation from gas-discharge plasma through the source of the EUV radiation with a rotating electrode, comprising: initiating a discharge between the different polarities electrodes and the ignition discharge pinch-type while rotating with the frequency v of the shaft, characterized in that the peripheral at distance R from the axis of rotation of the field electrode gap pulse channel is formed from the vapor of the working medium circuit for the interelectrode gap value d, and then carry out the ignition pinch-type discharge, wherein discharge cycles are produced with a repetition rate f≥2πvR / d and the working medium flow compensated by continuously supplying low-melting metal on the surface, at least one of elektrodov.8. A method of producing EUV radiation from gas-discharge plasma according to claim 7, characterized in that the vapor channel formation is performed by pulse laser or electron beam focused on a layer of low-melting metal.