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CRUCIBLE FOR VAPOR-DEPOSITING SUBSTRATE TO BE TREATED FOR ORGANIC ELECTROLUMINESCENCE DIODE, VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD
CRUCIBLE FOR VAPOR-DEPOSITING SUBSTRATE TO BE TREATED FOR ORGANIC ELECTROLUMINESCENCE DIODE, VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD
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机译:用于有机电致发光二极管处理的气相沉积基质,气相沉积系统和气相沉积方法的坩埚
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摘要
PROBLEM TO BE SOLVED: To solve the reduction of reproducibility at the time of vapor deposition and the problem generated in an organic material.;SOLUTION: A crucible 12 for vapor deposition for vapor-depositing an organic layer onto a substrate to be treated for an organic electroluminescence diode is provided with: a bottom part 11 at which an organic material is arranged at the time of vapor deposition treatment; an opening part 13 from which the vaporized organic material is exhausted at the time of the vapor deposition; and at least one bent part 14 provided between the bottom part and the opening part in such a manner that the bottom part is not viewed from the opening part. Further, a vapor deposition system and a vapor deposition method are provided.;COPYRIGHT: (C)2006,JPO&NCIPI
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