首页> 外国专利> CRUCIBLE FOR VAPOR-DEPOSITING SUBSTRATE TO BE TREATED FOR ORGANIC ELECTROLUMINESCENCE DIODE, VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD

CRUCIBLE FOR VAPOR-DEPOSITING SUBSTRATE TO BE TREATED FOR ORGANIC ELECTROLUMINESCENCE DIODE, VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD

机译:用于有机电致发光二极管处理的气相沉积基质,气相沉积系统和气相沉积方法的坩埚

摘要

PROBLEM TO BE SOLVED: To solve the reduction of reproducibility at the time of vapor deposition and the problem generated in an organic material.;SOLUTION: A crucible 12 for vapor deposition for vapor-depositing an organic layer onto a substrate to be treated for an organic electroluminescence diode is provided with: a bottom part 11 at which an organic material is arranged at the time of vapor deposition treatment; an opening part 13 from which the vaporized organic material is exhausted at the time of the vapor deposition; and at least one bent part 14 provided between the bottom part and the opening part in such a manner that the bottom part is not viewed from the opening part. Further, a vapor deposition system and a vapor deposition method are provided.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:解决的问题:解决气相沉积时再现性降低以及有机材料中产生的问题。解决方案:用于气相沉积的坩埚12,用于将有机层气相沉积到要处理的基材上有机电致发光二极管具备:底部11,在蒸镀处理时配置有有机材料。开口部13,在蒸镀时从中排出气化的有机材料。至少一个弯曲部分14设置在底部和开口部分之间,使得从开口部分看不到底部。此外,提供了一种气相沉积系统和气相沉积方法。版权所有:(C)2006,JPO&NCIPI

著录项

  • 公开/公告号JP2006104524A

    专利类型

  • 公开/公告日2006-04-20

    原文格式PDF

  • 申请/专利权人 FUJI ELECTRIC HOLDINGS CO LTD;

    申请/专利号JP20040293390

  • 发明设计人 MATSUKAZE NORIYUKI;

    申请日2004-10-06

  • 分类号C23C14/24;C23C14/12;H05B33/10;H01L51/50;

  • 国家 JP

  • 入库时间 2022-08-21 21:53:32

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