EVALUATION METHOD OF VAPOR DEPOSITION CHAMBER OF ORGANIC DEVICE MANUFACTURING APPARATUS STANDARD MASK APPARATUS AND STANDARD SUBSTRATE USED THEREIN STANDARD MASK APPARATUS MANUFACTURING METHOD ORGANIC DEVICE MANUFACTURING APPARATUS HAVING VAPOR DEPOSITION CHAMBER EVALUATED BY EVALUATION METHOD ORGANIC DEVICE HAVING VAPOR DEPOSITION LAYER FORMED IN VAPOR DEPOSITION CHAMBER EVALUATED BY EVALUATION METHOD AND VAPOR DEPOSITION CHAMBER MAINTENANCE METHOD OF ORGANIC DEVICE MANUFACTURING APPARATUS

摘要

A method for evaluating a deposition chamber of an apparatus for manufacturing an organic device is a deposition process in which a material is deposited on a standard substrate including a standard mark through a through hole of a standard mask of a standard mask apparatus to form a deposition layer on a standard substrate in the deposition chamber and a unloading step of unloading the standard substrate on which the deposition layer is formed from the manufacturing apparatus, and an observation step of observing the positional relationship between the standard mark and the deposition layer on the standard substrate unloaded from the production device.