Evaluation method of deposition chamber of manufacturing device of organic device, standard mask device and standard substrate used in evaluation method, manufacturing method of standard mask device, and manufacturing apparatus of organic device equipped with vapor deposition chamber evaluated by evaluation method Organic device having deposited layer formed in the deposition chamber evaluated in the evaluation method, and maintenance method of deposition chamber of organic device manufacturing apparatus

摘要

Problem to be solved: to provide a method for evaluating the relative position accuracy between a mask device and an electrode substrate of an organic device manufacturing apparatus.Evaluation methodIn the deposition chamberA deposition step of depositing a material on a substrate 110 of a standard substrate including a standard mark 63 through a through hole 56 of a standard mask 50A of a standard mask device to form a deposition layer 130 on the substrate 110 of the standard substrateA delivery step of carrying a standard substrate on which a deposition layer is formed is carried out from a manufacturing apparatusAn observation process for observing the positional relationship between a standard mark and a deposited layer on a standard substrate carried out from a manufacturing device.Selection diagram