Vapor deposition mask and its manufacturing method, vapor deposition mask device and its manufacturing method, intermediate, vapor deposition method, and organic EL display device manufacturing method

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition mask capable of accurately joining the intermediate body to the opening of the support body when stacking and reinforcing the intermediate body of the vapor deposition mask on the support body in order to increase the strength in the production of the vapor deposition mask. In a vapor deposition mask 20 including a mask body 30 and a support body 40 bonded to the mask body, the mask body has a first alignment mark 34, and the support body has a second alignment mark 44. The first alignment mark and the second alignment mark are provided at positions where they overlap each other in a plan view, and one of them is larger than the other. [Selection diagram] Fig. 3