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Creating and applying variable bias rules in rule-based optical proximity correction for reduced complexity
Creating and applying variable bias rules in rule-based optical proximity correction for reduced complexity
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机译:在基于规则的光学邻近校正中创建和应用可变偏差规则,以降低复杂性
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摘要
An optical proximity correction (OPC) based integrated circuit design system and method introduce a variable rule in which rules are specified in terms of multiple correction actions that yield acceptable results. This category of rules provides more degrees of freedom in actual application so that the rule-based OPC tool can intelligently select the proper valid rule that minimizes the OPC complexity or meets other objectives.
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