CREATING AND APPLYING VARIABLE BIAS RULE IN RULE-BASED OPTICAL PROXIMITY CORRECTION FOR REDUCED COMPLEXITY

摘要

PROBLEM TO BE SOLVED: To provide an optical proximity correction (OPC) based integrated circuit (IC) design system and method for applying specified correction rules in rule-based OPC, that is more fracture-friendly and generates simpler OPC output, without significantly compromising accuracy.;SOLUTION: The optical proximity correction (OPC) based integrated circuit design system and method introduce a variable rule where the rules are specified in terms of multiple correction actions that yield acceptable results, but this category of rules provides more degrees of freedom in actual application so that the rule-based OPC tool can intelligently select the proper valid rule that minimizes the OPC complexity or meets other objectives.;COPYRIGHT: (C)2007,JPO&INPIT