METHOD FOR MANUFACTURING HAZE NOISE STANDARD CONTAINING NANOSTRUCTURE ON INSULATING MEMBRANE

摘要

PROBLEM TO BE SOLVED: To provide a new noise standard capable of covering the overall operation ranges of a particle contamination measuring device, and to provide a defect detection device.;SOLUTION: In the method for manufacturing Haze noise standards each having insulating membranes (102 and 202) and a plurality of nanostructures (114, 116, 214, 216) of hemispherical form formed on the insulating membrane, each standard is manufactured by the formation on at least one insulating film (102, 202) of seeds (106, 107), made of a first semiconductor material by chemical deposition using a first precursor gas (104) for the first semiconductor material and the formation on the insulating layer (102, 202) of nanostructures (114, 116, 214₁, 214₂, 214₃, 214₄) arranged on a second semi-conductor material and in the form of hemispheres, from stable seeds of the first semiconductor material by chemical deposition that uses a second precursor gas (119) for the second semiconductor material.;COPYRIGHT: (C)2007,JPO&INPIT