[1]Key Laboratory of Microelectronic Devices&Integrated Technology;
Institute of Microelectronics of Chinese Academy of Sciences;
Beijing 100029;
China;
[1]Key Laboratory of Microelectronic Devices&Integrated Technology;
Institute of Microelectronics of Chinese Academy of Sciences;
Beijing 100029;
China;
[2]University of Chinese Academy of Sciences;
Beijing 100049;
China;
[1]Key Laboratory of Microelectronic Devices&Integrated Technology;
Institute of Microelectronics of Chinese Academy of Sciences;
Beijing 100029;
China;
[1]Key Laboratory of Microelectronic Devices&Integrated Technology;
Institute of Microelectronics of Chinese Academy of Sciences;
Beijing 100029;
China;
[1]Key Laboratory of Microelectronic Devices&Integrated Technology;
Institute of Microelectronics of Chinese Academy of Sciences;
Beijing 100029;
China;
[2]University of Chinese Academy of Sciences;
Beijing 100049;
China;
micro-sieves; high volume manufacturing; defect free; high yield;