Method for fabricating haze noise standards comprising nano-structures on an insulating thin layer

摘要

Method for the fabrication of Haze noise standards having, respectively, an insulating thin layer and a plurality of nano-structures of hemi-spherical form on the insulating thin layer, with the respective standards being fabricated by: the formation on at least one insulating layer of seeds made of a first semi-conductor material by chemical deposition from a first precursor gas for the first semi-conductor material, formation on the insulating layer of nano-structures based on a second semi-conductor material and in the form of hemi-spheres, from stable seeds of the first semi-conductor material, by chemical deposition from a second precursor gas of the second semi-conductor material. The invention also relates to a calibration method using standards obtained by means of such a method.