首页> 外国专利> Integrated circuit design and system design support program used design method for an integrated circuit, the design method for an integrated circuit

Integrated circuit design and system design support program used design method for an integrated circuit, the design method for an integrated circuit

机译:集成电路设计和系统设计支持程序使用了用于集成电路的设计方法,用于集成电路的设计方法

摘要

PROBLEM TO BE SOLVED: To provide a photomaskless prototype method having both the advantages of a photomaskless prototype method capable of creating a prototype without producing a photomask and the advantages of a photomask prototype method capable of using pattern information at the time of trial production as it is in mass production. Provided are a design method of an integrated circuit that realizes a photomaskless / photomask fusion method that combines a photomask prototype method, a design support program and an integrated circuit design system that are used in the design method of the integrated circuit. A photomask under a common design environment that can be used in a photomaskless process for creating an integrated circuit without using a photomask based on pattern information and a photomask process for creating an integrated circuit using a photomask based on pattern information. Based on pattern information for prototyping corresponding to the less process and photomask process, a prototype of an integrated circuit is created without using a photomask. After evaluation, improvements are made as necessary to create common pattern information, and the common pattern information is improved. A formal mask is generated and used for mass production by performing a formal conversion as necessary without adding it. [Selection] Figure 2
机译:解决的问题:提供一种无光掩模原型方法,该方法既具有无光掩模原型方法的优点,该方法能够在不生产光掩模的情况下创建原型,又具有能够在试生产时使用图案信息的光掩模原型方法的优点。正在量产。提供一种集成电路的设计方法,该集成电路的设计方法实现了将光掩模原型方法,设计支持程序和用于集成电路的设计方法中的集成电路设计系统相结合的无光掩模/光掩模融合方法。可以在不使用基于图案信息的光掩模的情况下用于创建集成电路的无光掩模工艺中使用的通用设计环境下的光掩模,以及使用基于图案信息的光掩模用于创建集成电路的光掩模工艺中使用的光掩模。基于用于与较少的工艺和光掩模工艺相对应的原型的图案信息,在不使用光掩模的情况下创建集成电路的原型。在评估之后,根据需要进行改进以创建公共图案信息,并且改进了公共图案信息。通过根据需要执行正式转换而无需添加正式掩模,可以生成正式掩模并将其用于批量生产。 [选择]图2

著录项

  • 公开/公告号JPWO2005076320A1

    专利类型

  • 公开/公告日2007-10-18

    原文格式PDF

  • 申请/专利权人 独立行政法人科学技術振興機構;

    申请/专利号JP20050517826

  • 发明设计人 川本 洋;

    申请日2005-02-10

  • 分类号G03F1/08;H01L21/82;H01L21/027;G03F7/20;

  • 国家 JP

  • 入库时间 2022-08-21 21:09:35

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