EPITAXIAL SEMICONDUCTOR STRUCTURES HAVING REDUCED STACKING FAULT NUCLEATION SITES
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机译:减少堆垛层错形核位置的表皮半导体结构
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Epitaxial silicon carbide layers are fabricated by forming features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The features include at least one sidewall that is orientated nonparallel (i.e., oblique or perpendicular) to the crystallographic direction. The epitaxial silicon carbide layer is then grown on the surface of the silicon carbide substrate that includes features therein.
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