structure and fabrication method of chip-embedded interposer, wafer-level stack structure of different kinds of chips using the same, and resultant package structure

摘要

A method for fabricating a chip-embedded interposer may comprise forming at least one cavity on a silicon substrate, forming a plurality of through vias penetrating the silicon substrate, providing an integrated circuit chip having a plurality of I/O pads, and forming rerouting conductors connected to the I/O pads and the through vias. A stack structure having different kinds of chips may be incorporated at wafer level using the described interposer.