LASER BEAM MACHINING APPARATUS, LASER BEAM MACHINING METHOD, TFT (THIN FILM TRANSISTOR) SUBSTRATE AND DEFECT CORRECTION METHOD OF TFT SUBSTRATE

摘要

PPROBLEM TO BE SOLVED: To provide a laser beam machining method capable of performing the laser beam machining of a workpiece with excellent accuracy. PSOLUTION: A pattern larger than the scanning range of a galvanomirror is machined by a laser beam machining apparatus comprising a laser beam source for radiating laser beams for machining, the galvanomirror for scanning the laser beams for machining in XY direction, and an XY stage for moving a workpiece in XY direction. In the workpiece, the pattern exceeding the scanning range of the galvanomirror is divided into a plurality of sections by the pattern stored within the scanning range of the galvanomirror, the pattern divided into the plurality of sections is moved in the scanning range of the galvanomirror by moving the XY stage, the laser beams for machining are scanned by the galvanomirror, and the laser beams for machining are radiated to the divided pattern to perform the laser beam machining. PCOPYRIGHT: (C)2009,JPO&INPIT