METHOD FOR PRODUCING SUBSTANCE, LASER BEAM MACHINING APPARATUS, METHOD FOR PRODUCING TFT SUBSTRATE, METHOD FOR PRODUCING MULTILAYER STRUCTURE SUBSTRATE AND METHOD FOR PRODUCING LIQUID CRYSTAL DISPLAY

摘要

PPROBLEM TO BE SOLVED: To provide a method for producing a base substance where a base substance is cut/divided using laser light, by which, even if dust or the like is stuck to the surface of a base substance, the base substance can be cut/divided with high precision. PSOLUTION: The method for producing a substrate P as a base substance is provided with: a stage where a film 48 is formed on the substrate P; a stage where the film 48 is irradiated with laser light 45, and the film 48 is transpired, so as to form a film removed part 49; a stage where the laser light 45 is further emitted so as to be connected with the film removed part 49, thus a material denatured part 47 is formed at the substrate P; a film residue detection stage where the film residue 48b in the film removed part 49 is detected; and a stage where a stress F is applied to the base substance P, so as to form divided pieces Q. PCOPYRIGHT: (C)2008,JPO&INPIT