METHOD OF PREDICTING DIMENSIONAL CONVERSION DIFFERENCE, METHOD OF MANUFACTURING PHOTOMASK, METHOD OF MANUFACTURING ELECTRONIC PART, AND PROGRAM OF PREDICTING DIMENSIONAL CONVERSION DIFFERENCE

摘要

PPROBLEM TO BE SOLVED: To provide a method of predicting a dimensional conversion difference, a method of manufacturing a photomask, a method of manufacturing an electronic part, and a program of predicting a dimensional conversion difference that can increase the accuracy of dimensional conversion difference prediction irrespective of the shape of a pattern. PSOLUTION: The method of predicting a dimensional conversion difference includes computing an open angle at an error prediction point from design pattern data and predicting a dimensional conversion difference according to the correlation of the open angle with a measured value of dimensional conversion difference. Alternatively, the method includes computing the incident amount of incident objects at a conversion difference prediction point from design data and predicting a dimensional conversion difference according to the correlation of the incident amount with a measured value of dimensional conversion difference. PCOPYRIGHT: (C)2009,JPO&INPIT