DIMENSION CONVERSION DIFFERENCE PREDICTING METHOD, PHOTOMASK MANUFACTURING METHOD, ELECTRONIC COMPONENT MANUFACTURING MEHTOD, AND DIMENSION CONVERSION DIFFERENCE PREDICTING PROGRAM

摘要

A dimension conversion difference predicting method, photomask manufacturing method, electronic component manufacturing method, and dimension conversion difference predicting program are provided to improve the prediction accuracy of the dimension conversion difference regardless of the shape of pattern. The incidence quantity of the incident object at the predicted point is obtained based on design data for conversion(S110). The dimension conversion difference is predicted based on correlation with the experimental value of the incidence quantity and the dimension conversion difference(S112). The incident angle at the predicted point is obtained for conversion based on design data. Subsequently, the incidence quantity is obtained based on the incident angle. The angular distribution of the incident object is obtained based on design data. Subsequently, the incidence quantity is obtained based on the angular distribution of the incident water.