COMMON DEFECT PROCESSING METHOD IN COLOR-FILTER PATTERN INSPECTION MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a processing method of axial common defect in a color-filter pattern inspection machine of outputting such a detection result that a color filter substrate, on which a large number of defects are detected in the same coordinate position of the X-direction or the Y-direction, is an abnormal product which produces the common defect, with respect to the defects of the color filter substrate detected by an inspection machine in a color filter pattern inspection process in a manufacturing method of a color filter.;SOLUTION: In the common defect processing method in color-filter pattern inspection machine, the inspection process of the color filter inspection machine for detecting the defects of a color filter in which a plurality of chips are formed on a multi-up substrate performs transformation from an image into a data image, draws features of the data image, draws defect abnormality by comparison collation, and a plurality of defects of which the positional coordinates are the same in the X-axis direction or the Y-axis direction are set as axial common defect and are additionally classified.;COPYRIGHT: (C)2009,JPO&INPIT