Epitaxial semiconductor structures having reduced stacking fault nucleation sites
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机译:具有减少的堆垛层错成核位点的外延半导体结构
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摘要
Epitaxial silicon carbide layers are fabricated by forming features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The features include at least one sidewall that is orientated nonparallel (i.e., oblique or perpendicular) to the crystallographic direction. The epitaxial silicon carbide layer is then grown on the surface of the silicon carbide substrate that includes features therein.
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