首页>
外国专利>
sodium adsorption to the surface of the integrated circuit suppression method and composition
sodium adsorption to the surface of the integrated circuit suppression method and composition
展开▼
机译:钠对集成电路表面的吸附抑制方法及组成
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method and composition for removing sodium-containing materials such as photoresist from microcircuit substrate material utilizes 1,2-Diaminocyclohexanetetracarboxylic Acid in an organic solvent.
展开▼