Optical magnification adjustment system and projection exposure device

摘要

smile on a scale correction optical system capable of correcting a magnification correction for magnification optical system for the purpose of providing to, the object plane (5) on the side of the positive lens first lens (1) for installation and image plane (7) installing the concave lens of the second lens (2) side to the first lens 1 and the second lens ( 2) by adjusting the center distance (d) between it is possible to enlarge or reduce a. ; radius of curvature of the concave surface of the first lens (first convex surface and the second lens of) (2) (R2) and (R3) is set to satisfy the food. ; Here, 2, 3 is the optical power of each surface ; n1 and n2 is the refractive index, respectively. ; the present invention the exposure apparatus as described above will have the effect that can realize an exposure corresponding to the proposal of a commercially available (W).