PROBLEM TO BE SOLVED: To provide a visual inspection device capable of intuitively and quantitatively evaluating fluctuation of complex structures of semiconductor devices.;SOLUTION: The visual inspection device comprises an image detection section 6 detecting an image of inspected material, an image processing section 91 processing the detected image, an image detection section 10 equipped with a scan control section having a beam control system 92 and a stage control system 93 to scan the inspected material, and an visual inspection processing section 20 inspecting an appearance from the detected image, wherein the visual inspection processing section 10 has a representative data preparing processing function 212 in which the resulting two or more images are overlapped to obtain a representative value (representative value data μ(x, y)) at each point (x, y) of images, a fluctuation data preparing processing function 213 in which an allowable range value (fluctuation data σ(x, y)) is obtained at each point (x, y) of two or more images, and a determination processing function 214 in which acceptance of an inspection object is determined on the basis of the representative value data and the fluctuation data.;COPYRIGHT: (C)2010,JPO&INPIT
展开▼
