Electroforming mold, electroforming method, and method of manufacturing a mold for the electroforming

摘要

PROBLEM TO BE SOLVED: To provide a die for electroforming with which a component having high shape accuracy and dimensional accuracy is produced, and to provide an electroforming method using the die for electroforming.;SOLUTION: The die for electroforming is composed of: a die structure made of silicon and having almost vertical side walls formed by dry etching; insulators for covering the side walls and the upper face of the die structure; a supporting substrate for supporting the die structures; and insulating connection layers for physically connecting the die structure and the supporting substrate, and has recessed parts each formed in such a manner that at least a part of the section at which the die structure is not formed is removed in the insulating connection layer.;COPYRIGHT: (C)2005,JPO&NCIPI