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Method of manufacturing lithography mask, lithography mask, and lithography mask exposure method
Method of manufacturing lithography mask, lithography mask, and lithography mask exposure method
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机译:光刻掩模的制造方法,光刻掩模和光刻掩模的曝光方法
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摘要
Cleaning is carried out by using a sulfuric acid type detergent at a resist stripping and cleaning step (step 5) in a semitranslucent portion forming process and a resist stripping and cleaning step (step 10) in a shielding band forming process, and a sulfuric acid removing step of partially or wholly removing a surface layer portion in a pattern into which a sulfate ion is adsorbed is then carried out to effectively remove the adsorbed sulfate ion.
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