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Device structures for a memory cell of a non-volatile random access memory and design structures for a non-volatile random access memory

机译:非易失性随机存取存储器的存储单元的设备结构和非易失性随机存取存储器的设计结构

摘要

Device and design structures for memory cells in a non-volatile random access memory (NVRAM). The device structure includes a semiconductor body in direct contact with the insulating layer, a control gate electrode, and a floating gate electrode in direct contact with the insulating layer. The semiconductor body includes a source, a drain, and a channel between the source and the drain. The floating gate electrode is juxtaposed with the channel of the semiconductor body and is disposed between the control gate electrode and the insulating layer. A first dielectric layer is disposed between the channel of the semiconductor body and the floating gate electrode. A second dielectric layer is disposed between the control gate electrode and the floating gate electrode.
机译:非易失性随机存取存储器(NVRAM)中存储单元的设备和设计结构。器件结构包括与绝缘层直接接触的半导体本体,控制栅电极和与绝缘层直接接触的浮栅电极。半导体本体包括源极,漏极以及在源极和漏极之间的沟道。浮置栅电极与半导体本体的沟道并置,并且布置在控制栅电极和绝缘层之间。第一介电层设置在半导体本体的沟道与浮置栅电极之间。第二介电层设置在控制栅电极和浮置栅电极之间。

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