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Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement
Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement
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机译:双极载体晶片和移动双极静电晶片装置
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摘要
The present invention relates to a bipolar carrier wafer and a mobile, bipolar electrostatic wafer arrangement. Carrier wafers and wafer arrangements of this type can be used in particular in the field of handling technology of semiconductor wafers. The carrier wafer according to the invention serves for mounting a disc-shaped semiconductor component. It has a first surface (2a) as front-side and a second surface (2b) which is situated opposite the first surface (2a) as rear-side. The carrier wafer is configured such that it has a carrier layer (2), an electrically insulating cover layer (3) which surrounds the carrier layer and an electrically conductive layer (4), the latter being disposed on the electrically insulating cover layer and being structured in at least two regions which are separated from each other electrically as electrodes. Electrical contacts are disposed on the rear-side (2b) of the carrier wafer, these electrical contacts being connected to the two electrodes disposed on the front-side (2a). On the electrically conductive layer (4), in addition an electrically insulating cover layer (8) is disposed which covers both the front-side (2a) and the edge of the carrier wafer between the front-side (2a) and the rear-side (2b).
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机译:本发明涉及一种双极载体晶片和可移动的双极静电晶片装置。这种载体晶片和这种晶片布置尤其可以用于半导体晶片的处理技术领域。根据本发明的载体晶片用于安装盘形半导体部件。它具有作为前侧的第一表面( 2 B> a I>)和第二表面( 2 B> b I>),位于背面的第一表面( 2 B> a I>)的对面。构造载体晶片,使得其具有载体层( 2 B>),围绕载体层的电绝缘覆盖层( 3 B>)和导电层(< B> 4 B>),后者设置在电绝缘覆盖层上,并在至少两个彼此电隔离的区域中构成电极。电触点设置在载体晶片的背面( 2 B> b I>)上,这些电触点连接到设置在正面( > 2 B> a I>)。在导电层( 4 B>)上,还设置了覆盖两个正面( 2 B>)的电绝缘覆盖层( 8 B>) > a I>)以及前侧( 2 B> a I>)和后侧( 2 B> b I>)。
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