OPTICAL PROXIMITY CORRECTION VERIFICATION METHOD USING OPTICAL PARAMETER AND RISK FUNCTION

摘要

PURPOSE: A method for verifying an optical proximity correction(OPC) using an optical parameter and a risk function is provided to improve the efficiency of the OPC by analyzing the kinds of a weak point of the OPC with a statistical method. CONSTITUTION: An OPC model is obtained(S1). An original database is obtained(S2). An optical proximity correction is performed based on the OPC model and the original database(S3). The verification for the OPC is performed(S4). An optical parameter is calculated referring to the verified OPC(S5). A risk function is calculated using the optical parameter(S6). The values of the risk function and normal check result are displayed(S7). Referring to the values of the risk function and the normal check result, a weak point is analyzed(S8).