NOZZLE ASSEMBLY AND A SUBSTRATE PROCESSING APPARATUS USING THE SAME, CAPABLE OF UNIFORMLY SUPPLYING A CHEMICAL ON THE ENTIRE OF A SUBSTRATE

摘要

PURPOSE: A nozzle assembly and a substrate processing apparatus using the same are provided to prevent the contamination of a nozzle base and a swing nozzle by flowing a chemical from the swing nozzle along a streamlined external tube.;CONSTITUTION: A nozzle base(320) is expanded to a longitudinal direction. A swing nozzle(340) is connected to the end of the nozzle base and includes a spray hole for a chemical. A driving shaft(371) provides rotation torque to the rotation center axis of the swing nozzle. A driving motor(374) includes a rotational shaft which is connected to the driving shaft. A concave groove is formed on the end of the driving shaft.;COPYRIGHT KIPO 2010