Method and system for manufacturing solar cells utilizing atmospheric pressure plasma chemical vapor deposition

摘要

A process and system for producing a thin-film solar cell using atmospheric pressure plasma chemical vapor deposition is disclosed. A plasma at substantially atmospheric pressure is used to deposit P-type layers, intrinsic layers and N-type layers to form one or more P-N junctions for use in a solar cell. The surface onto which a P-N junction is deposited may be prepared or cleaned using the plasma at substantially atmospheric pressure. Alternatively, the plasma at substantially atmospheric pressure may be used to deposit other layers of the solar cell such as conductive layers in contact with a P-N junction.