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METHOD AND SYSTEM FOR PRODUCING A SOLAR CELL USING ATMOSPHERIC PRESSURE PLASMA CHEMICAL VAPOR DEPOSITION
METHOD AND SYSTEM FOR PRODUCING A SOLAR CELL USING ATMOSPHERIC PRESSURE PLASMA CHEMICAL VAPOR DEPOSITION
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机译:用常压等离子体化学气相沉积制备太阳能电池的方法和系统
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摘要
A process and system for producing a thin-film solar cell using atmospheric pressure plasma chemical vapor deposition is disclosed. A plasma at substantially atmospheric pressure is used to deposit P-type layers, intrinsic layers and N-type layers to form one or more P-N junctions for use in a solar cell. The surface onto which a P-N junction is deposited may be prepared or cleaned using the plasma at substantially atmospheric pressure. Alternatively, the plasma at substantially atmospheric pressure may be used to deposit other layers of the solar cell such as conductive layers in contact with a P-N junction.
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