Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of Perfluorohexane

摘要

A mass of nanoparticles/nanorods were formed on a simultaneously deposited gran- ular film by plasma enhanced chemical vapor deposition(PECVD)of perfluorohexane at atmo- spheric pressure without any catalysts or templates.Scanning electron microscopy(SEM)and X-ray photoelectron spectroscopy(XPS)were used to characterize the morphology and the chem- ical compositions of nanoparticles.The average size of particles is about 100 nm and the length of synthesized nanorods is between 1 μm and 2.5 μm.The analyses of transmission electron mi- croscopy(TEM),high-resolution transmission electron microscopy(HRTEM),selected area elec- tron diffraction(SAED)and X-ray diffraction(XRD)reveals that the nanoparticles and nanorods are crystalline.