Properties of Plasma Enhanced Chemical Vapor Deposition Barrier Coatings and Encapsulated Polymer Solar Cells

摘要

In this paper, we report silicon oxide coatings deposited by plasma enhanced chemical vapor deposition technology(PECVD) on 125 μm polyethyleneterephthalate(PET) surfaces for the purpose of the shelf lifetime extension of sealed polymer solar cells. After optimization of the processing parameters, we achieved a water vapor transmission rate(WVTR) of ca. 10-3g/m2/day with the oxygen transmission rate(OTR) less than 0.05 cc/m2/day, and succeeded in extending the shelf lifetime to about 400 h in encapsulated solar cells. And then the chemical structure of coatings related to the properties of encapsulated cell was investigated in detail.