Being the fluorine-containing thin film which is formed to the production mannered null backing material surface of the backing material which

摘要

PROBLEM TO BE SOLVED: To obtain a fluorine-containing thin film excellent in the adhesion with a base material and also excellent in dimensional precision and mold releasability as a precise mold.;SOLUTION: The fluorine-containing thin film is formed on the surface of the base material and constituted by simultaneously depositing a fluorine-containing organic substance, which can be deposited by a vapor deposition method, and a substance, which can be deposited by an ion beam sputtering method, on the surface of the base material. The fluorine-containing organic substance is a perfluoro type polymer and this polymer contains at least one double bond carbon or triple bond carbon and a -COOH group or an -Si(OR)₃ group (wherein R is an alkyl group) in its molecule. The fluorine-containing organic substance is an amorphous perfluoro resin.;COPYRIGHT: (C)2006,JPO&NCIPI