Fluorescent film, film forming method of fluorescent film, dielectric multilayer film, optical element, optical system, imaging unit, optical characteristic measuring apparatus, optical characteristic measuring method, exposure apparatus, exposure method, and device manufacturing method

摘要

Including a base material made of a fluoride capable of transmitting ultraviolet light, and an activator doped in the base material, wherein the activator includes a transition element or a rare earth element, and the ultraviolet light is irradiated in the base material. And a dielectric multilayer film having the fluorescent film, and an optical element, an image pickup apparatus, an optical characteristic measuring apparatus, an exposure apparatus, an exposure method, and a device using the fluorescent film. Production method.