FLUORESCENT FILM, METHOD OF FORMING FLUORESCENT FILM, MULTILAYER DIELECTRIC FILM, OPTICAL ELEMENT, OPTICAL SYSTEM, IMAGING UNIT, OPTICAL PROPERTY MEASURING APPARATUS, METHOD OF MEASURING OPTICAL PROPERTY, EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DEVICE

摘要

A fluorescent film including a base material constituted of a UV-permeable fluoride, and an activator doped in the base material, wherein the activator contains a transition element or a rare earth element and emits fluorescent light in the base material when ultraviolet light is irradiated to the base material. Also disclosed are a multilayer dielectric film including the fluorescent film, and an optical element, an imaging unit, an optical property measuring apparatus, an exposure apparatus, an exposure method, and a device manufacturing method utilizing the fluorescent film.