FLUORESCENT FILM, FILM-FORMING METHOD THEREFOR, MULTILAYER DIELECTRIC FILM, OPTICAL ELEMENT, OPTICAL SYSTEM, IMAGING UNIT, INSTRUMENT FOR MEASURING OPTICAL CHARACTERISTICS, METHOD OF MEASURING OPTICAL CHARACTERISTICS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

Provided is a fluorescent film including a base material, which comprises a UV-permeable fluoride, and an activator with which the base material is doped. The fluorescent film is characterized in that the activator contains a transition element or a rare earth element, and that fluorescence is generated when the activator in the base material is exposed to ultraviolet light. Further provided are a multilayer dielectric film having the fluorescent film, as well as an optical element using the fluorescent film, an imaging apparatus, an instrument for measuring optical characteristics, an exposure apparatus, an exposure method, and a device manufacturing method.