FLUORESCENT FILM, FILM-FORMING METHOD THEREFOR, MULTILAYER DIELECTRIC FILM, OPTICAL ELEMENT, OPTICAL SYSTEM, IMAGING UNIT, INSTRUMENT FOR MEASURING OPTICAL CHARACTERISTICS, METHOD OF MEASURING OPTICAL CHARACTERISTICS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

A fluorescent film including a base material constituted of a UV-permeable fluoride, and an activator doped in the base material, wherein the activator contains a transition element or a rare earth element and emits fluorescent light in the base material when ultraviolet light is irradiated to the base material. Also disclosed are a multilayer dielectric film including the fluorescent film, and an optical element, an imaging unit, an optical property measuring apparatus, an exposure apparatus, an exposure method, and a device manufacturing method utilizing the fluorescent film.