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RECESSED CHANNEL TRANSISTOR DEVICES, DISPLAY APPARATUSES INCLUDING RECESSED CHANNEL TRANSISTOR DEVICES, AND METHODS OF FABRICATING RECESSED CHANNEL TRANSISTOR DEVICES
RECESSED CHANNEL TRANSISTOR DEVICES, DISPLAY APPARATUSES INCLUDING RECESSED CHANNEL TRANSISTOR DEVICES, AND METHODS OF FABRICATING RECESSED CHANNEL TRANSISTOR DEVICES
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机译:后退的晶体管装置,包括后退的晶体管装置的显示装置以及制造后退的晶体管装置的方法
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摘要
Recessed channel transistor (RCT) devices, methods of manufacturing the RCT devices, and a display apparatuses including the RCT devices. A RCT device includes a substrate, a first trench in the substrate and having a first width; a first gate insulating layer on an inner wall of the first trench; a first recess gate on the first gate insulating layer and having a groove in a center portion of an upper surface of the first recess gate; and a source and drain in the substrate on both sides of the first recess gate.
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